Clean Flower Basket
Wafer Cleaning Basket · Wafer Cleaning Basket
Wafer carrier for semiconductor silicon wafer cleaning processes. Features a precision design with uniform groove spacing to securely hold wafers, optimized for strict cleanroom environments.
Specifications & Key Parameters
| Structural Form | Vertical, horizontal, and lid-type cassettes: matched to cleaning equipment and tank configurations. |
|---|---|
| Slot Spacing | Precision-designed uniform slot spacing, customized by wafer diameter and loading capacity. |
| Hosting Method | Multi-point support for stable load bearing, reducing wafer surface contact and impact damage. |
| Material | High-purity PFA / PVDF / PP, matched to the chemical system and process temperature. |
| Clean Adaptation | Designed for strict cleanroom environments; cleaned and packaged in a sterile state. |
Material Description
Wafer baskets are carriers used in semiconductor silicon wafer cleaning processes. They securely hold wafers during wet cleaning, etching, and rinsing steps while ensuring uniform chemical flow between wafers. The precision-engineered design features evenly spaced slots with multi-point support to minimize surface contact, reducing the risk of chipping and contamination. Materials are selected to match the chemical system and process temperature requirements, ensuring compatibility with stringent cleanroom environments. Shengtongyuan customizes basket structures based on customer-specified wafer diameter, load capacity, and equipment interface compatibility. Available configurations include vertical, horizontal, and cassette-style designs. Custom specifications are confirmed per order. Each shipment includes material certification and cleanroom test data.
Applicable Process Scenarios
- Wafer Wet Cleaning and Etching Process Carriers
- Batch Cleaner Equipment and Manual Tank Turnover
- Wafer protection during post-cleaning rinse and drying
Supply and Service Terms
| Available Sources | Multiple clean equipment processing enterprises, matched against the customer access list. |
|---|---|
| Standard Lead Time | Standard specifications are shipped from stock; custom specifications are subject to the confirmed order. |
| Minimum Order Quantity (MOQ) | Samples and small-batch trials supported |
| File available | Material Certificate, Cleanliness Test Report, Dimensional Inspection Data |
The above describes the supply scope. Specifics regarding brand, grade, packaging, and lead time are subject to the supply plan confirmed by both parties.